A clean room is a harsh environment for quality control measurements. High air flow and vibration from pumps demand the use of isolation tables and air flow control. But with every square foot of clean room space at a premium, these added measures become very expensive, and the cost of moving optics in and out of a clean room for measurement can also be prohibitive. Instantaneous measurement, made possible through 4D's Dynamic Interferometry technology, makes it possible to measure in clean rooms despite vibration and turbulence. Accurate measurements can be made without vibration isolation tables, so a minimum of floor space is required. Keeping measurement equipment within the clean room means measurements can be made more often as well, for better quality monitoring with little impact on schedules. Available at wavelengths from 193 nm to 10.6 microns, 4D dynamic interferometers are used daily in clean room environments around the world, measuring everything from DUV lithography optics to infrared optical systems.
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