Placing a laser interferometer or surface profiler directly into a precision polishing system eliminates a significant amount of material handling and fixturing time. The result is highly efficient processing and far less risk of damage to optics during handling. The challenge for in situ measurement, however, is overcoming the air flow, vibration and noise associated with such equipment. Instantaneous measurement using 4D's Dynamic Interferometry technology, makes it possible measure despite the difficult environment of the factory floor. 4D systems can be incorporated directly into polishing equipment, providing immediate feedback for the polishing process. Systems such as the NanoCam Sq Dynamic Profiler can even be mounted on robots, on gantries, or directly in polishing equipment for outstanding flexibility. |
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