4D's dynamic Fizeau laser interferometers measure flatness, shape, thickness uniformity, homogeneity and wedge of flat-surfaced mirrors, windows, wedges, filters, etc., from deep UV through IR, despite air movement and vibration. AccuFiz systems excel at fast, repeatable surface shape and transmitted wavefront measurement. Short coherence FizCam systems measure both sides of plane-parallel optics as thin as 200 microns.
NanoCam and FlexCam systems measure surface roughness on coated and uncoated surfaces to ensure the quality of polishing processes.
4D PhaseCam Twyman-Green interferometers are the industry choice for measuring concave spherical optics, from several millimeters to tens of meters in diameter.
4D’s AccuFiz Fizeau interferometers can measure the flatness of wafers up to 300mm in diameter. The unique AccuFiz SIS measures wafer thickness and variation at several critical wavelengths, including 1.55 microns. Use the NanoCam Sq to measure surface roughness and patterned regions of patterned wafers, and rely on the FlexCam to quantify wafer defects.
Measuring surface roughness and quantifying the size and position of defects are critical to the successful manufacturing of flexible electronics. For commercial roll to roll (R2R) manufacturing, rapid process feedback and high areal coverage mandate that these crucial metrology operations must take place in situ, on web platforms moving at high speeds, despite a high-vibration environment and motion of the web in relation to the measurement instruments.
Bright field inspection methods can image large areas but have insufficient lateral resolution to measure fine defects, nor can they quantify surface roughness. Off-line, 3D inspection tools are slow, sensitive to vibration, and cannot provide real time feedback.
4D Technology’s FlexCam can measure roughness and quantify defects on webs at up to 1 meter/min, enabling real-time monitoring and control of roughness to less than 0.5 nm rms. The system provides accurate measurement without vibration isolation, despite runout and web flutter. FlexCam also identifies and quantifies defects, registering their position within the roll. Extrinsic versus intrinsic defects can be discriminated to help isolate their root cause.
Flat panel display production requires accurate metrology at every step of the process. 4D PhaseCam interferometers have been designed to measure flatness and defects on glass substrates, while 4D FlexCam and NanoCam measure surface roughness and defects. You can also use PolarCam snapshot micropolarizer cameras to inspect polarization quality of polarizer films.
FlexCam compact, optical surface profiler can measure roughness and quantify defects on webs at up to 1 meter/min, enabling real-time monitoring and control of roughness to less than 0.5 nm rms. FlexCam also identifies and quantifies defects, registering their position within the roll. The system provides accurate measurement without vibration isolation, despite runout and web flutter.