NanoCam Sq Optical Profilers
Compact, Vibration-Immune Roughness Measurement
The NanoCam Sq lets you measure roughness directly in a polishing station. Measuring in situ greatly increasing throughput and reduces measurement cycle time. It also eliminates the risk of damage that comes with transporting expensive, mission-critical hardware.

NanoCam Sq Description
Applications for NanoCam Sq optical profilers include surface roughness of small and large coated/uncoated optics, on-machine surface roughness metrology, and process control for polishing operations.
All NanoCam Sq Dynamic Optical Profilers include 4Sight advanced analysis software. Industry-leading 4Sight software reports ISO 25178 surface roughness parameters (S parameters) and provides extensive 2D and 3D analysis options, data filtering, masking and import/export functions.

Measuring Sub-Angstrom Roughness
How do you measure roughness with sub-angstrom precision in a noisy manufacturing environment?
Read this white paper for a break-down of the options, and illustrations of the challenges presented by different solutions.
What to expect
The compact, lightweight NanoCam Sq measurement head measures just 9.6 x 9.6 x 3.3 inches and weighs less than 10 pounds, making it very easy to position for roughness measurement. Acquisition time of 100 µsec enables measurement despite noise and vibration. Multiple mounting options include a motorized, joystick controlled tripod, mobile workstation, and interfaces to polishing equipment, gantries or robots. Interference objectives provide magnifications from 0.9X through 50X, with an optional 2X magnification multiplier. Each objective can measure samples with reflectivity from 1% to 100% without changing reference optics.
- Portable Roughness Measurement for Small Optics
- 3D Surface Roughness on Large Optics
On-Machine Polishing Metrology
4D supplies a turnkey interferometric system:
- Interferometer Mainframe
- Advanced software for taking measurements and analyzing the results
- Complete computer system
- Connecting cables and power supplies
Accessories include:
- Multi-axis mounting and aligning the mainframe
- Optical mounts
- Reference optics
- Diverging lenses for varying the beam shape
- ESPI accessory for
4Sight wavefront analysis software features a user-friendly interface with unmatched simplicity, analysis features and graphical displays.
The measurement functions assist in alignment and measurement execution, and set-up of masking, reference subtraction, terms removal, and similar matters.
Data analysis functions such as Zernike, Seidel, geometric and diffraction analysis are easy to perform.
Share your data across many analysis applications, such as MatLab and CodeV.
Highlighted Features
Compact and Lightweight
Measure roughness anywhere on large optics, mirror segments or small optics
Versatile
Excellent light efficiency of the system, it’s possible to measure surfaces with reflectivity from 1% to 100%.
Vibration Immune
Acquisition speeds as fast as 100 microseconds let the NanoCam Sq measure on robots, on gantries or in polishing stations.
Automation Ready
Built-in automation API in the software. Put the NanoCam on a robot arm, or on a motorized gantry system.
data
analysis software

Measuring Segmented Mirrors
Read about measuring segmented mirrors on our application page.
Get In Touch
(520) 294-5600
Location
3280 E Hemisphere Loop, Ste 146
Tucson, AZ 85706
4Dinfo@ontoinnovation.com
Office Hours (Arizona Time)
Mon: 8am - 5pm
Tue: 8am - 5pm
Wed: 8am - 5pm
Thur: 8am - 5pm
Fri: 8am - 5pm
Sat: Closed
Sun: Closed