520-294-5600 4dinfo@nanometrics.com

Semiconductor

Wafers

4D PhaseCam Twyman-Green interferometers are the industry choice for measuring concave spherical optics, from several millimeters to tens of meters in diameter.

4D’s AccuFiz Fizeau interferometers can measure the flatness of wafers up to 300mm in diameter. The unique AccuFiz SIS measures wafer thickness and variation at several critical wavelengths, including 1.55 microns. Use the NanoCam Sq to measure surface roughness and patterned regions of patterned wafers, and rely on the FlexCam to quantify wafer defects.

Added Technical Resources

Measurement of Space Optics and Structures

This paper presents an overview of the techniques and configurations used to build dynamic interferometers and measurement results for a variety of space-based optical components.

Vibrational Characteristics of Light-weight Mirrors

We present a technique to characterize and quantitatively measure the vibrational mode shapes and amplitudes of mirrors concurrently with surface figure testing..

Products for Semiconductor

AccuFiz SIS

Measures both sides of transparent, parallel optics as thin as 200 microns, surfaces in multi-surface optical systems, remote cavity test setups, and solid cavities such as etalons (laser rods).

Optical Profilers

NanoCam Sq  systems measure surface roughness on coated and uncoated flats to ensure the quality of polishing processes. 

Do you need custom-built metrology?

Get a free consultation. 4D Technology’s mechanical, optical, electrical and software engineering teams are standing by to evaluate what it would take to meet your application’s requirements.

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(520) 294-5600

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