4D PhaseCam Twyman-Green interferometers are the industry choice for measuring concave spherical optics, from several millimeters to tens of meters in diameter.
4D’s AccuFiz Fizeau interferometers can measure the flatness of wafers up to 300mm in diameter. The unique AccuFiz SIS measures wafer thickness and variation at several critical wavelengths, including 1.55 microns. Use the NanoCam HD to measure surface roughness and patterned regions of patterned wafers and to quantify wafer defects.
Added Technical Resources
Measuring Sub-Angstrom Roughness
How do you measure roughness with sub-angstrom precision in a noisy manufacting environment?
Read this white paper for a break-down of the options, and illustrations of the challenges presented by different solutions.
Products for Semiconductor
Measures both sides of transparent, parallel optics as thin as 200 microns, surfaces in multi-surface optical systems, remote cavity test setups, and solid cavities such as etalons (laser rods).
Compact, vibration-immune and incredibly flexible, PhaseCam Twyman-Green interferometers are the industry choice for measuring concave spherical optics, from several millimeters to tens of meters in diameter.
NanoCam HD systems measure surface roughness on coated and uncoated precision surfaces to ensure the quality of polishing processes.
Do you need custom-built metrology?
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