AccuFiz High Resolution Laser Interferometer
6 MP resolution to measure aspheres and steep slopes.
The highest available resolution for measuring steep slopes, aspheric surfaces and small diameter optics.

AccuFiz 6MP Laser Interferometer Description
The AccuFiz 6MP laser interferometer provides the highest available resolution for measuring steep slopes, aspheric surfaces and small diameter optics. Its 2400 x 2400 pixel sensor doubles the measurable spatial frequency range and quadruples the sampling capability of standard Fizeau interferometers. The added resolution makes it possible to measure surface shape earlier in the manufacturing process and to capture polishing marks despite high fringe counts. Measure spherical/aspherical optics and molds with unprecedented accuracy. Use the AccuFiz 6MP’s high pixel density and optional High Power Alignment Laser for accurate measurement of smaller optics.
A range of laser sources, aperture sizes, mounting components and accessories provides flexibility for a wide range of applications and budgets. Optional dynamic mode lets you measure despite vibration and air turbulence, without an air table.

Remote Control
Control the AccuFiz Fizeau interferometer with a touch screen device.

Vibration insensitive
Optional Dynamic Interferometry for measurement on the shop floor or in a clean room, despite vibration, without isolation.

Full range of options and accessories
Designed for flexibility, the AccuFiz family includes a range of laser sources, aperture sizes, mounting components and accessories.

Adjustable Extended Source
The industry’s only adjustable extended source reduces coherent artifacts for extremely low measurement noise.

Horizontal Mount
Vibration-free operation does not require an air table.

Vertical Mount
Stands are available for look-down and look-up operation.

100mm or 150mm apertures
Optimized optical trains for 4 inch or 6 inch apertures.
What to expect
The AccuFiz 6MP operates at visible (632.8nm) wavelength. Apertures of 100 mm (4 in) and 150 mm (6 in) are available. The stabilized sources provide higher power and a longer coherence length which does not drift with temperature, simplifying long-cavity measurements.
AccuFiz Model | Stabilized Laser | Wavelength | Camera | Extended Source | Aperture | Optical Zoom |
H100S | Yes | 633 nm | 6 MP, 12-bit | Yes | 100 mm | No |
H150S | Yes | 633 nm | 6 MP, 12-bit | Yes | 150 mm | No |
The AccuFiz 6MP is sold as a turnkey interferometric system:
- Interferometer
- Advanced software for taking measurements and analyzing the results
- Complete computer system
- Connecting cables and power supplies
Accessories can include:
- Optical mounts
- Reference optics (flat or spheres)
- Linear table guides
- Stands for horizontal, look-down or look-up mounting
4Sight™ wavefront analysis software, included with every AccuFiz, features excellent ease of use and a short learning curve. 2D and 3D displays, filtering, thresholds and masking tools make it easy to highlight surface shape and texture. Zernike, Seidel, geometric and diffraction analyses are easy to perform. Comprehensive data sharing capabilities let you read, write, save and print data in many common file formats for comparison between instruments.
- Adjustable Extended Source
- Surface Isolation Source
- Dynamic Interferometry mode
- Optical Zoom
- Radius of Curvature
data
analysis software

Fizeaus and optical production
AccuFiz Fizeau interferometers are well suited to optics manufacturing.
- Qualify shape and mid-spatial frequencies
- Measure flats, spheres, cubes and mirrors
- Wavefront transmission quality measurements
- Fast and precise
- Use in Aerospace, Semiconductor and Optics industries
Get In Touch
(520) 294-5600
Location
3280 E Hemisphere Loop, Ste 146
Tucson, AZ 85706
4Dinfo@ontoinnovation.com
Office Hours (Arizona Time)
Mon: 8am - 5pm
Tue: 8am - 5pm
Wed: 8am - 5pm
Thur: 8am - 5pm
Fri: 8am - 5pm
Sat: Closed
Sun: Closed